While Intel has their high NA EUV equipment arriving on site now for install, it looks like TSMC won’t be getting theirs until 2030 with the plan of having it online for 2032, because reasons.
https://techovedas.com/3-reasons-why-tsmc-wont-adopt-high-na-euv-lithography-until-2032/
https://techovedas.com/3-reasons-why-tsmc-wont-adopt-high-na-euv-lithography-until-2032/