planar 22-nm

TSMC has taped out its first chip with limited use of extreme ultraviolet lithography (EUV) and will start risk production on a 5nm node with full EUV in April 2019. "TSMC said that N5 will deliver 14.7% to 17.7% speed gains and 1.8 to 1.86 area shrinks based on tests with Arm A72 cores. The...